Micromachining Using XUV～X-Ray

Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography

The present technology advancement in biomedical, micro-electro-mechanical systems (MEMS) engineering, bio-MEMS, healthcare, etc. is driving the need to fabricate devices with multi-level, high aspect ratio and complex microstructures which in turn requires high quality mold inserts with all these features. This research addressed fabrication challenges of a PMMA mold insert template containing...

Novel Poly-L-Lactides micromachining by X-ray lithography

Silicon Micromachining Using In Situ DC Microplasmas

This paper reports on the generation of spatially confined plasmas and their application to silicon etching. The etching is performed using SF6 gas and dc power applied between thin-film electrodes patterned on the silicon wafer to be etched. The electrodes also serve as a mask for the etching. The typical operating pressure and power density are in the range of 1–20 Torr and 1–10 W/cm, respect...

Switchable magnetic metamaterials using micromachining processes.

switchable metamaterials that possess very different states are almost a necessity. [ 11 ] Most of the tunable metamaterials that have been demonstrated rely on tuning constituent materials or changing surrounding media by introducing natural materials with higher tunability, such as liquid crystals and phase changing materials. [ 12–19 ] However, this limits the choices of materials and become...

Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams

We report femtosecond laser micromachining of micron-size curved structures using tailored accelerating beams. We report surface curvatures as small as 70 μm in both diamond and silicon, which demonstrates the wide applicability of the technique to materials that are optically transparent or opaque at the pump laser wavelength. We also report the machining of curved trenches in silicon. Our res...